Title :
A modular system of Deep Level Transient Spectroscopy
Author :
Rusli, Nazreen ; Debuf, Didier
Author_Institution :
Dept. of Inf. & Commun. Technol., Int. Islamic Univ. Malaysia, Malaysia
Abstract :
Deep Level Transient Spectroscopy (DLTS) is a technique to determine the electrical characteristics of an electrically active defect in a semiconductor. A measurement system is developed to detect defects in a semiconductor in a LabView environment. A more accurate method namely Fundamental Frequency Deep Level Transient Spectroscopy (FFDLTS) is proposed as one of the methods to analyze the defect level depth.
Keywords :
deep level transient spectroscopy; deep levels; p-n junctions; DLTS; LabView environment; defect level depth; electrical properties; electrically active semiconductor defects; fundamental frequency deep level transient spectroscopy; measurement system; modular system; p-n junctions; Capacitance; Equations; Instruments; Radiative recombination; Spectroscopy; Temperature measurement; Transient analysis; DLTS; Defect; FFDLTS; LabVIEW;
Conference_Titel :
Computer Applications and Industrial Electronics (ICCAIE), 2011 IEEE International Conference on
Conference_Location :
Penang
Print_ISBN :
978-1-4577-2058-1
DOI :
10.1109/ICCAIE.2011.6162137