DocumentCode
3457980
Title
Narrow Bandwidth Single-Resonator MEMS Tuning Fork Filter
Author
Yan, Jize ; Seshia, Ashwin A. ; Phan, Kim L. ; Steeneken, Peter G. ; van Beek, J.T.M.
Author_Institution
Univ. of Cambridge, Cambridge
fYear
2007
fDate
May 29 2007-June 1 2007
Firstpage
1366
Lastpage
1369
Abstract
We present a solution for a fourth-order, narrow-bandwidth filter comprising of a single silicon tuning fork resonator driven using one electrode only. Voltage controlled electrical spring tuning is employed to match the primary and secondary modes of the resonator to achieve filter response. A narrow bandwidth single resonator MEMS tuning fork filter is demonstrated with a center frequency of 1.2866 MHz, a 3 dB-bandwidth of 0.0085% and a 1.5 dB ripple.
Keywords
UHF filters; micromechanical resonators; resonator filters; vibrations; Si; electrode; frequency 1.2866 MHz; narrow bandwidth single-resonator MEMS; silicon tuning fork resonator; tuning fork filter; voltage controlled electrical spring tuning; Bandwidth; Electrodes; Matched filters; Micromechanical devices; Resonator filters; Silicon; Springs; Tuning; Vibrations; Voltage control;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum. IEEE International
Conference_Location
Geneva
ISSN
1075-6787
Print_ISBN
978-1-4244-0646-3
Electronic_ISBN
1075-6787
Type
conf
DOI
10.1109/FREQ.2007.4319300
Filename
4319300
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