Title :
Narrow Bandwidth Single-Resonator MEMS Tuning Fork Filter
Author :
Yan, Jize ; Seshia, Ashwin A. ; Phan, Kim L. ; Steeneken, Peter G. ; van Beek, J.T.M.
Author_Institution :
Univ. of Cambridge, Cambridge
fDate :
May 29 2007-June 1 2007
Abstract :
We present a solution for a fourth-order, narrow-bandwidth filter comprising of a single silicon tuning fork resonator driven using one electrode only. Voltage controlled electrical spring tuning is employed to match the primary and secondary modes of the resonator to achieve filter response. A narrow bandwidth single resonator MEMS tuning fork filter is demonstrated with a center frequency of 1.2866 MHz, a 3 dB-bandwidth of 0.0085% and a 1.5 dB ripple.
Keywords :
UHF filters; micromechanical resonators; resonator filters; vibrations; Si; electrode; frequency 1.2866 MHz; narrow bandwidth single-resonator MEMS; silicon tuning fork resonator; tuning fork filter; voltage controlled electrical spring tuning; Bandwidth; Electrodes; Matched filters; Micromechanical devices; Resonator filters; Silicon; Springs; Tuning; Vibrations; Voltage control;
Conference_Titel :
Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum. IEEE International
Conference_Location :
Geneva
Print_ISBN :
978-1-4244-0646-3
Electronic_ISBN :
1075-6787
DOI :
10.1109/FREQ.2007.4319300
