Unusual behavior of uncoated thick-film PZT cantilevers towards fluid phases sensing. Application to water and ethanol detection

Author

Lakhmi, Riadh ; Lucat, Claude ; Dufour, Isabelle ; Debeda, Helene

Author_Institution

IMS, Univ. Bordeaux, Talence, France

fYear

2013

fDate

16-20 June 2013

Firstpage

1142

Lastpage

1145

Abstract

Detection of water and ethanol vapors is successfully performed using the 31-longitudinal mode of uncoated Au/PZT/Au cantilevers giving respectively negative and positive resonance frequency shifts. Differences between the cantilever´s response to water and ethanol vapors are explained by the higher wettability of gold towards ethanol. High values of frequency shifts cannot be justified by the viscosity and density effect of those gases but by the mass and stiffness effects. The negative shifts obtained with liquid ethanol and water is confirmed by the measurements realized in liquids having different viscosities. Correlations between shifts obtained and mass/stiffness effects related to the porous microstructure of PZT thick-film cantilever are proposed.

Keywords

cantilevers; gas sensors; gold; lead compounds; piezoelectric devices; resonance; viscosity; Au-PZT-Au; density effect; ethanol vapor detection; fluid phase sensing; negative resonance frequency shift; positive resonance frequency shift; uncoated thick film cantilever; viscosity effect; water vapor detection; Ethanol; Humidity; Liquids; Resonant frequency; Sensors; Viscosity; 31-longitudinal mode; PZT cantilever; chemical sensor; ethanol; humidity; uncoated;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626974

Filename

6626974