Gas detection and identification using MEMS TOF mass spectrometer

Author

Tassetti, C.-M. ; Peyssonneaux, O. ; Mahieu, R. ; Danel, J.-S. ; Progent, F. ; Machuron-Mandard, X. ; Duraffourg, L.

Author_Institution

DAM, CEA, Arpajon, France

fYear

2013

fDate

16-20 June 2013

Firstpage

1162

Lastpage

1165

Abstract

This work reports on both the micro fabrication of a miniaturized MEMS ion source and its utilization as a simple Time-Of-Flight (TOF) MEMS mass spectrometer for gas detection. Microelectronic manufacturing process is used for the fabrication. The ion source and the analyzer are manufactured simultaneously and collectively. The ionizer generates one of the highest current for an integrated ion source. Mass spectra of several gases, such as ethanol, argon, krypton and xenon have been obtained.

Keywords

gas sensors; ion sources; microfabrication; microsensors; organic compounds; time of flight mass spectra; time of flight mass spectrometers; TOF; argon; ethanol; gas detection; gas identification; krypton; mass spectra; microelectronic manufacturing process; microfabrication; miniaturized MEMS ion source; time-of-flight MEMS mass spectrometer; xenon; Argon; Detectors; Electrodes; Fabrication; Ionization; Micromechanical devices; Silicon; Ionizer; MEMS device; gas detection; mass spectrometer;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626979

Filename

6626979