Localized heating to tungsten oxide nanostructures deposition on gas microsensor arrays via aerosol assisted CVD

Aerosol Assisted Chemical Vapor Deposition (AACVD) induced via localized heating microsensor platforms is used to directly deposit tungsten oxide nanostructures from tungsten hexacarbonyl [W(CO)₆] precursor. Results demonstrate the viability to grow and confine either nanoparticle-like or quasi-one-dimensional-like structures on microsensor devices by using the self-heating capability of the sensor platforms. The microsensors fabricated using this method show appreciable responses to toluene, with sensors based on films composed of nanoneedles and nanotubes having almost two-fold higher responses than sensors based on films composed of nanoparticles.