Title :
Electromagnetic modeling of thin-film bulk acoustic resonators
Author :
Farina, Marco ; Rozzi, Tullio
Author_Institution :
Ist. di Elettromagnetismo e Bioingegneria, Universita Politecnica delle Marche, Ancona, Italy
Abstract :
This contribution introduces a technique for the electromagnetic analysis of thin-film bulk acoustic wave resonators (FBAR). The piezoelectric/acoustic linear equations are coupled to and solved with Maxwell´s equations. For the acoustic propagation, mono-dimensional behavior is assumed, while full-wave 3D Maxwell´s equations are rigorously solved for the complete circuit. Comparison with experimental data shows very good agreement.
Keywords :
Maxwell equations; acoustic resonators; bulk acoustic wave devices; computational electromagnetics; method of moments; thin film devices; Maxwell equation solving; Maxwell equations; acoustic linear equation; acoustic propagation; bulk acoustic wave devices; electromagnetic analysis; electromagnetic modeling; full-wave 3D Maxwell´s equation; method of moments; mono-dimensional behavior; piezoelectric linear equation; thin-film bulk acoustic resonators; thin-film bulk acoustic wave resonators; Acoustic propagation; Acoustic waves; Coupling circuits; Electromagnetic analysis; Electromagnetic modeling; Film bulk acoustic resonators; Maxwell equations; Piezoelectric films; Thin film circuits; Transistors;
Conference_Titel :
Microwave Symposium Digest, 2004 IEEE MTT-S International
Print_ISBN :
0-7803-8331-1
DOI :
10.1109/MWSYM.2004.1335902
