Title :
Effect of adsorption-desorption on resonant frequency of the nano beam
Author :
Liu, Tongqing ; Yu, Hong ; Huang, Qing-An
Author_Institution :
Key Lab. of MEMS, Southeast Univ., Nanjing
Abstract :
The effect of adsorption-desorption on the characteristic of the doubly clamped nano beam is analyzed theoretically by considering the mass variation resulted from adsorption. The frequency shift is obtained and compared with the effect of air damping. It is shown that the frequency shift which is induced by the effect of adsorption is about 1%, much higher than the effect of air damping. The relationships between frequency shift and pressure, temperature and beam size are also given out. The results have shown that nano-scale beam is more susceptible to adsorption-desorption noise than bulk mechanical beam.
Keywords :
adsorption; beams (structures); desorption; micromechanical devices; nanostructured materials; MEMS; adsorption-desorption noise; air damping; beam size; doubly clamped nanobeam; frequency shift; mass variation; resonant frequency; Atmosphere; Chemical processes; Damping; Laboratories; Micromechanical devices; Nanoelectromechanical systems; Resonance light scattering; Resonant frequency; Surface cleaning; Temperature;
Conference_Titel :
Information Acquisition, 2006 IEEE International Conference on
Conference_Location :
Shandong
Print_ISBN :
1-4244-0528-9
Electronic_ISBN :
1-4244-0529-7
DOI :
10.1109/ICIA.2006.305879
