Title :
Design of Temperature Compensation System of Pressure Sensors
Author :
Chen, Guiyou ; Sun, Tongjing ; Wang, Pitao ; Sun, Bo
Author_Institution :
Sch. of Control Sci. & Eng., Shandong Univ., Jinan
Abstract :
In order to improve the accuracy of silicon piezoresistance pressure sensor under different temperatures, temperature compensation should be carried out. A temperature compensation system of pressure sensors is presented. The structure, hardware and software design of the system are introduced. In the hardware design, MAX1452 is used as the main compensation unit. A curve fitting algorithm based on cubic B-spline is adopted in the temperature compensation software design. The accuracy and the production efficiency of the sensors are improved. The system features in low cost, high efficiency and high accuracy. And it has great spreading value
Keywords :
computerised instrumentation; piezoresistive devices; pressure sensors; splines (mathematics); MAX1452 hardware; cubic B-spline algorithm; curve fitting algorithm; silicon piezoresistance pressure sensors; software design; temperature compensation system; Curve fitting; Hardware; Piezoresistance; Production; Sensor systems; Silicon; Software algorithms; Software design; Spline; Temperature sensors; MAX1452; cubic B-spline; pressure sensors; temperature compensation;
Conference_Titel :
Information Acquisition, 2006 IEEE International Conference on
Conference_Location :
Weihai
Print_ISBN :
1-4244-0528-9
Electronic_ISBN :
1-4244-0529-7
DOI :
10.1109/ICIA.2006.305883
