Title :
Wide tuning-range resonant-frequency control by combining electromechanical softening and hardening springs
Author :
Cuong Phu Le ; Halvorsen, Einar
Author_Institution :
Dept. of Micro & Nano Syst. Technol., Vestfold Univ. Coll., Horten, Norway
Abstract :
This paper presents a device concept for electrostatic resonators utilizing a combination of electromechanically softening and mechanically hardening springs in order to improve tuning capability and reach low values of the resonant frequency. The microscale device was designed for and fabricated in the SOIMUMPS process with a device-layer thickness of 25μm and an active area of 4×5mm2. Measurements with base-excitation of the device demonstrate a large tuning range from about 1147Hz down to 120Hz and a maximum relative bandwidth exceeding 100%, e.g. 740Hz.
Keywords :
electromechanical effects; electrostatic actuators; frequency control; hardening; micromechanical resonators; microsensors; silicon-on-insulator; softening; springs (mechanical); SOIMUMPS process; Si; electromechanical hardening spring; electromechanical softening spring; electrostatic resonator; electrostatic transducer; microscale device design; size 25 mum; tuning range resonant frequency control; Acceleration; Electrostatics; Force; Resonant frequency; Springs; Transducers; Voltage measurement; Electrostatic transducers; end-stops; hardening and softening springs;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627028
