The mean temperature of semiconductor bodies measurement using radiometric method

The basic problems of the mean temperature values of semiconductor bodies measurement by radiometric methods are studied. The objectives are to minimize the deviation of determined data from the mean temperature value. With that aim a number of approaches are presented. For elementary cases the mean temperature value is estimated by one-fold measurement. Optimization problem is to find the frequency band as well as antenna properties which minimize the deviation of determined value from the object mean temperature. Reconstruction procedures are based on utilization of a number of measured data. Measurements are carried out under different conditions distinguished by frequency band or some antenna parameters. The mean temperature value is found from the temperature distribution reconstructed from measured data. The weighted summing method also is based on a number of measured data utilizations. The estimated value of the object mean temperature is calculated by weighted summing of measured data. In accordance with the proposed approach weights are determined as real values minimized by the deviation of weighted sum from the mean temperature value. For presented approaches the principal problems are formulated, calculation procedures are discussed and a number of numerical results are presented.