Title :
Mode selection behavior of VHF thermal-piezoresistive self-sustained oscillators
Author :
Hall, H.J. ; Walker, D.E. ; Wang, Lingfeng ; Fitch, R.C. ; Bunch, J.S. ; Pourkamali, Siavash ; Bright, V.M.
Author_Institution :
Univ. of Colorado at Boulder, Boulder, CO, USA
Abstract :
The work demonstrates performance of thermal-piezoresistive self-sustained oscillators in both vacuum and ambient air conditions, up to 161MHz with AC peak-to-peak voltages of up to 44mV. The devices are of an I-shaped geometry fabricated from 1.6-1.9μm thick n-type silicon. While strong resonance is demonstrated in their intended in-plane longitudinal structural mode (gm up to -238 μA/V), the device oscillation was verified by laser vibration sensing to occur in a different mode. Finite element simulation suggests that the longitudinally symmetric flexural mode is the mode of oscillation.
Keywords :
VHF oscillators; elemental semiconductors; finite element analysis; lasers; piezoresistive devices; sensors; silicon; vibration measurement; AC peak- to-peak voltage; I-shaped geometry; Si; VHF thermal-piezoresistive self-sustained oscillator; finite element simulation; in-plane longitudinal structural mode; laser vibration sensor; longitudinally symmetric flexural mode; mode selection behavior; size 1.6 mum to 1.9 mum; Laser modes; Oscillators; Performance evaluation; Piezoresistance; Resonant frequency; Sensors; Silicon; Oscillator; Resonator; VHF; limit cycle oscillation;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627038
