Title :
LTCC-based three dimensional inductors with nano-ferrite embedded core for one-chip tunable RF systems
Author :
Lin, Yu-Chen ; Gabler, F. ; Tsai, Y.-C. ; Tanaka, Shoji ; Gessner, T. ; Esashi, Masayoshi
Author_Institution :
WPI-AIMR, Tohoku Univ., Sendai, Japan
Abstract :
In this study, anodically-bondable LTCC (low temperature cofired ceramic) technology is applied for forming inductors to realizes three-dimensional configuration, simplify fabrication process and miniaturize device size. Nano-ferrite is embedded as core material to increase performance of the integrated inductors. Design, simulation, fabrication are described and characterized results indicate the potential of using this approach for future one-chip tunable RF systems.
Keywords :
ceramic packaging; ferrites; inductors; integrated circuit packaging; nanofabrication; nanostructured materials; radiofrequency integrated circuits; 3D LTCC-based inductor; chip tunable RF system; fabrication process; integrated inductor; low temperature cofired ceramic; miniaturize device size; nanoferrite embedded core; Coils; Fabrication; Inductance; Inductors; Magnetic cores; Materials; Q-factor; LTCC; RF system; integrated inductor; micro coil; multi-GHz; nano material core;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627041
