LTCC-based three dimensional inductors with nano-ferrite embedded core for one-chip tunable RF systems

Author

Lin, Yu-Chen ; Gabler, F. ; Tsai, Y.-C. ; Tanaka, Shoji ; Gessner, T. ; Esashi, Masayoshi

Author_Institution

WPI-AIMR, Tohoku Univ., Sendai, Japan

fYear

2013

fDate

16-20 June 2013

Firstpage

1404

Lastpage

1407

Abstract

In this study, anodically-bondable LTCC (low temperature cofired ceramic) technology is applied for forming inductors to realizes three-dimensional configuration, simplify fabrication process and miniaturize device size. Nano-ferrite is embedded as core material to increase performance of the integrated inductors. Design, simulation, fabrication are described and characterized results indicate the potential of using this approach for future one-chip tunable RF systems.

Keywords

ceramic packaging; ferrites; inductors; integrated circuit packaging; nanofabrication; nanostructured materials; radiofrequency integrated circuits; 3D LTCC-based inductor; chip tunable RF system; fabrication process; integrated inductor; low temperature cofired ceramic; miniaturize device size; nanoferrite embedded core; Coils; Fabrication; Inductance; Inductors; Magnetic cores; Materials; Q-factor; LTCC; RF system; integrated inductor; micro coil; multi-GHz; nano material core;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627041

Filename

6627041