Title :
Low-voltage-actuated MEMS mirror array with high fill factor for photonic switch applications
Author :
Nakajima, Masahiro ; Kuwabara, Kenta ; Sakata, Tsuyoshi ; Usui, Mitsuo ; Ishihara, Takuya ; Kodate, J. ; Hadama, K. ; Nemoto, N. ; Yamamoto, Takayuki ; Jin, Yichao
Author_Institution :
NTT Microsyst. Integration Labs., NTT Corp., Atsugi, Japan
Abstract :
This paper describes the design, fabrication and characterization of a novel, low-voltage-actuated MEMS tilting mirror array with high fill factor (91%). The movable ladder-shaped electrode is placed apart from the rotation axis to increase a rotational torque. The balancer and H-shaped hinge were employed to ensure the good anti-vibration performance. The measured DC scanning properties and resonant frequency agree well with simulated values. The micromirror achieved a rotation angle of 2° at low operating voltage (<;20V). This mirror will be useful for an application of photonic switches in wavelength division multiplexing networks.
Keywords :
hinges; micro-optomechanical devices; microelectrodes; microfabrication; micromirrors; optical fabrication; photonic switching systems; wavelength division multiplexing; DC scanning properties; H-shaped hinge; antivibration performance; balancer; fill factor; ladder-shaped electrode; low-voltage-actuated MEMS tilting mirror array design; low-voltage-actuated MEMS tilting mirror array fabrication; micromirror; photonic switch applications; resonant frequency; rotation axis; rotational torque; wavelength division multiplexing networks; Arrays; Electrodes; Fabrication; Micromechanical devices; Micromirrors; Optical switches; MEMS; balancer; ladder-shaped electrode; micromirror array; wavelength selective crossconnect (WXC); wavelength selective switch (WSS);
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627044
