DocumentCode
3459226
Title
A newly designed curved beam microshutter display device with high aperture ratio
Author
Keun-Seo Lim ; Jun-Bo Yoon
Author_Institution
Dept. of Electr. Eng., KAIST, Daejeon, South Korea
fYear
2013
fDate
16-20 June 2013
Firstpage
1420
Lastpage
1423
Abstract
This paper reports a curved beam microshutter display device with a novel part-division design to achieve high aperture ratio. The part-division design which consists of two parts doing respective functions is a simple method to enhance performance of the curved beam microshutter. The proposed device accomplished 68% of the aperture ratio by the fixed shutter plate part and a thermal actuator on the actuator part enabled the device to be actuated with under 2V, which are greatly enhanced values compared with those of the conventional curved beam microshutters reported as 30% and 120V.
Keywords
actuators; microdisplays; micromechanical devices; fixed shutter plate; high aperture ratio; newly designed curved beam microshutter display device; part-division design; thermal actuator; voltage 2 V; Actuators; Apertures; Electrodes; Fabrication; Films; Modulation; Resonant frequency; Microshutter display device; bimorph thermal actuator; part-division design;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location
Barcelona
Type
conf
DOI
10.1109/Transducers.2013.6627045
Filename
6627045
Link To Document