• DocumentCode
    3459370
  • Title

    Characterization and calibration of U-shaped mass density and viscosity sensors by an analytical modeling approach

  • Author

    Heinisch, Martin ; Reichel, Erwin K. ; Voglhuber-Brunnmaier, Thomas ; Jakoby, Bernhard

  • Author_Institution
    Inst. for Microelectron. & Microsensors, Johannes Kepler Univ., Linz, Austria
  • fYear
    2013
  • fDate
    16-20 June 2013
  • Firstpage
    1448
  • Lastpage
    1451
  • Abstract
    This contribution is about resonant viscosity and mass density sensors based on oscillating U-shaped structures which are operated at their fundamental resonance frequencies. The actuation and read-out for both types of sensors are based on Lorentz forces. The measuring principle, the device setups, complete analytical models relating the (known) input to the (measured) output signals as well as first measurements obtained with the discussed devices are presented.
  • Keywords
    calibration; density measurement; mass measurement; resonance; sensors; viscosity measurement; Lorentz force; U-shaped mass density sensor; analytical modeling approach; fundamental resonance frequency; oscillating U-shaped structure; resonant viscosity sensor; Density measurement; Frequency measurement; Liquids; Resonant frequency; Sensors; Temperature measurement; Viscosity; Lorentz forces; Mass density sensor; Viscosity sensor; kHz range;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
  • Conference_Location
    Barcelona
  • Type

    conf

  • DOI
    10.1109/Transducers.2013.6627052
  • Filename
    6627052