DocumentCode
3459370
Title
Characterization and calibration of U-shaped mass density and viscosity sensors by an analytical modeling approach
Author
Heinisch, Martin ; Reichel, Erwin K. ; Voglhuber-Brunnmaier, Thomas ; Jakoby, Bernhard
Author_Institution
Inst. for Microelectron. & Microsensors, Johannes Kepler Univ., Linz, Austria
fYear
2013
fDate
16-20 June 2013
Firstpage
1448
Lastpage
1451
Abstract
This contribution is about resonant viscosity and mass density sensors based on oscillating U-shaped structures which are operated at their fundamental resonance frequencies. The actuation and read-out for both types of sensors are based on Lorentz forces. The measuring principle, the device setups, complete analytical models relating the (known) input to the (measured) output signals as well as first measurements obtained with the discussed devices are presented.
Keywords
calibration; density measurement; mass measurement; resonance; sensors; viscosity measurement; Lorentz force; U-shaped mass density sensor; analytical modeling approach; fundamental resonance frequency; oscillating U-shaped structure; resonant viscosity sensor; Density measurement; Frequency measurement; Liquids; Resonant frequency; Sensors; Temperature measurement; Viscosity; Lorentz forces; Mass density sensor; Viscosity sensor; kHz range;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location
Barcelona
Type
conf
DOI
10.1109/Transducers.2013.6627052
Filename
6627052
Link To Document