DocumentCode :
3459370
Title :
Characterization and calibration of U-shaped mass density and viscosity sensors by an analytical modeling approach
Author :
Heinisch, Martin ; Reichel, Erwin K. ; Voglhuber-Brunnmaier, Thomas ; Jakoby, Bernhard
Author_Institution :
Inst. for Microelectron. & Microsensors, Johannes Kepler Univ., Linz, Austria
fYear :
2013
fDate :
16-20 June 2013
Firstpage :
1448
Lastpage :
1451
Abstract :
This contribution is about resonant viscosity and mass density sensors based on oscillating U-shaped structures which are operated at their fundamental resonance frequencies. The actuation and read-out for both types of sensors are based on Lorentz forces. The measuring principle, the device setups, complete analytical models relating the (known) input to the (measured) output signals as well as first measurements obtained with the discussed devices are presented.
Keywords :
calibration; density measurement; mass measurement; resonance; sensors; viscosity measurement; Lorentz force; U-shaped mass density sensor; analytical modeling approach; fundamental resonance frequency; oscillating U-shaped structure; resonant viscosity sensor; Density measurement; Frequency measurement; Liquids; Resonant frequency; Sensors; Temperature measurement; Viscosity; Lorentz forces; Mass density sensor; Viscosity sensor; kHz range;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
Type :
conf
DOI :
10.1109/Transducers.2013.6627052
Filename :
6627052
Link To Document :
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