Title :
MEMS high-doses radiation sensor
Author :
Augustyniak, I. ; Dziuban, J. ; Knapkiewicz, P. ; Matusiak, M. ; Olszacki, M. ; Pons, P.
Author_Institution :
Wroclaw Univ. of Technol., Wrocław, Poland
Abstract :
New MEMS sensor for detection of high doses (above 10 kGy) of radiation has been presented. The sensor is made of silicon and glass in a form of anodically bonded sandwich 9 × 16 × 2.6 mm3. The sensor contains chamber with small portion of high density polyethylene (HDPE) and thin silicon membrane. Irradiation releases gaseous hydrogen, which flows from the chamber to the membrane. For known radiation dose pressure of hydrogen destroys the membrane, what is optically noticed. The sensor show good detectability of doses of radiation up to 120 kGy.
Keywords :
elemental semiconductors; glass; hydrogen; microsensors; polymers; radiation effects; radiation pressure; semiconductor thin films; silicon; silicon radiation detectors; HDPE; MEMS high dose radiation sensor; Si-SiO2; dose detectability; glass; high density polyethylene; high dose radiation detection; hydrogen releases; irradiation; membrane destruction; radiation dose pressure; thin silicon membrane; Accidents; Degradation; Glass; Hydrogen; Micromechanical devices; Radiation effects; Silicon; MEMS radiation sensor; high dose radiation; polyethylene degradation;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627066
