Powder Sputtered SnO2, ZnO Thin Film Gas Sensors

Author

Jianping, Xing ; Lei, Zhou ; Debin, Hong ; Jingjing, Sun ; Nanwan, Qiu

Author_Institution

Sch. of Inf. Sci. & Eng., Shandong Univ., Jinan

fYear

2006

fDate

20-23 Aug. 2006

Firstpage

1305

Lastpage

1310

Abstract

Powder sputtering method has the advantage of doping impurity stability. Some performances of SnO₂, ZnO gas sensing thin film and the idea of designing gas sensor are introduced. The processing, techniques, chip structure and performance about two kinds of thin film gas sensors are given out. Simultaneously, we got two conclusions: the first one, metal oxide thin film sensor obtained by the powder sputtering method is likely to become popular goods in the field of gas sensors; the other one, ZnO thin film is another gas sensor basic material besides SnO₂ that can be studied and developed. The key for ZnO thin film sensor is to choose the suitable substrate

Keywords

II-VI semiconductors; gas sensors; impurities; semiconductor doping; semiconductor growth; semiconductor thin films; sputter deposition; thin film sensors; tin compounds; zinc compounds; SnO₂; ZnO; chip structure; doping impurity stability; gas sensing thin film; metal oxide thin film sensor; powder sputtering method; thin film gas sensors; Doping; Gas detectors; Impurities; Inorganic materials; Powders; Sputtering; Stability; Substrates; Thin film sensors; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Information Acquisition, 2006 IEEE International Conference on

Conference_Location

Weihai

Print_ISBN

1-4244-0528-9

Electronic_ISBN

1-4244-0529-7

Type

conf

DOI

10.1109/ICIA.2006.305940

Filename

4097873