Title :
Powder Sputtered SnO2, ZnO Thin Film Gas Sensors
Author :
Jianping, Xing ; Lei, Zhou ; Debin, Hong ; Jingjing, Sun ; Nanwan, Qiu
Author_Institution :
Sch. of Inf. Sci. & Eng., Shandong Univ., Jinan
Abstract :
Powder sputtering method has the advantage of doping impurity stability. Some performances of SnO2, ZnO gas sensing thin film and the idea of designing gas sensor are introduced. The processing, techniques, chip structure and performance about two kinds of thin film gas sensors are given out. Simultaneously, we got two conclusions: the first one, metal oxide thin film sensor obtained by the powder sputtering method is likely to become popular goods in the field of gas sensors; the other one, ZnO thin film is another gas sensor basic material besides SnO2 that can be studied and developed. The key for ZnO thin film sensor is to choose the suitable substrate
Keywords :
II-VI semiconductors; gas sensors; impurities; semiconductor doping; semiconductor growth; semiconductor thin films; sputter deposition; thin film sensors; tin compounds; zinc compounds; SnO2; ZnO; chip structure; doping impurity stability; gas sensing thin film; metal oxide thin film sensor; powder sputtering method; thin film gas sensors; Doping; Gas detectors; Impurities; Inorganic materials; Powders; Sputtering; Stability; Substrates; Thin film sensors; Zinc oxide;
Conference_Titel :
Information Acquisition, 2006 IEEE International Conference on
Conference_Location :
Weihai
Print_ISBN :
1-4244-0528-9
Electronic_ISBN :
1-4244-0529-7
DOI :
10.1109/ICIA.2006.305940
