Title :
All-polymer high-aspect-ratio spring with embedded electrode
Author :
Yue Feng ; Suzuki, Yuya
Author_Institution :
Dept. of Mech. Eng., Univ. of Tokyo, Tokyo, Japan
Abstract :
In this report, we propose an all-polymer high-aspect-ratio (HAR) spring with embedded electrode for in-plane low-frequency transducers. Using the capillary effect, conductive polymer has been successfully introduced into inherent voids in HAR parylene springs. We also develop a novel `valve´ structure to stop the surface-tension-driven liquid flow in order to electrically isolate different sets of electrodes that are mechanically connected. Resistance and robustness of the parylene spring with embedded electrode is also characterized.
Keywords :
capillarity; conducting polymers; microsensors; microvalves; springs (mechanical); surface tension; transducers; MEMS; all-polymer HAR parylene spring; capillary effect; conductive polymer; electrical isolate electrode; embedded electrode; high aspect ratio; in-plane low-frequency transducer; surface tension driven liquid flow; valve structure; Electrodes; Liquids; Micromechanical devices; Reservoirs; Silicon; Springs; Valves; Conductive polymer; Embedded electrode; Parylene HAR spring; Surface-tension-driven liquid;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627082
