All-polymer high-aspect-ratio spring with embedded electrode

Author

Yue Feng ; Suzuki, Yuya

Author_Institution

Dept. of Mech. Eng., Univ. of Tokyo, Tokyo, Japan

fYear

2013

fDate

16-20 June 2013

Firstpage

1569

Lastpage

1572

Abstract

In this report, we propose an all-polymer high-aspect-ratio (HAR) spring with embedded electrode for in-plane low-frequency transducers. Using the capillary effect, conductive polymer has been successfully introduced into inherent voids in HAR parylene springs. We also develop a novel `valve´ structure to stop the surface-tension-driven liquid flow in order to electrically isolate different sets of electrodes that are mechanically connected. Resistance and robustness of the parylene spring with embedded electrode is also characterized.

Keywords

capillarity; conducting polymers; microsensors; microvalves; springs (mechanical); surface tension; transducers; MEMS; all-polymer HAR parylene spring; capillary effect; conductive polymer; electrical isolate electrode; embedded electrode; high aspect ratio; in-plane low-frequency transducer; surface tension driven liquid flow; valve structure; Electrodes; Liquids; Micromechanical devices; Reservoirs; Silicon; Springs; Valves; Conductive polymer; Embedded electrode; Parylene HAR spring; Surface-tension-driven liquid;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627082

Filename

6627082