A new three axis low power MEMS gyroscope for consumer and industrial applications

Author

Oliver, A.D. ; Teo, Y.L. ; Geisberger, A. ; Steimle, R.F. ; Cassagnes, T. ; Adhikari, K. ; Sadler, D. ; McNeil, A.

Author_Institution

Freescale Semicond., Tempe, AZ, USA

fYear

2015

fDate

21-25 June 2015

Firstpage

31

Lastpage

34

Abstract

The manuscript reports a new commercially available three axis gyroscope, the Freescale^® FXAS21002C. The 6.8 mW power consumption is 20% less than the nearest competitor´s three axis device while meeting standard consumer device parameters. The three axis gyroscope has two proof masses and an open loop control scheme. The open loop architecture and the discontinuous control scheme contribute to this differentiated power consumption.

Keywords

gyroscopes; microfabrication; microsensors; open loop systems; power measurement; Freescale FXAS21002C; differentiated power consumption; discontinuous control; open loop control scheme; power 6.2 mW; three axis low power MEMS gyroscope; Application specific integrated circuits; Gyroscopes; Micromechanical devices; Power demand; Temperature measurement; Temperature sensors; Transducers; 3-axis; Gyroscope; low power;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7180853

Filename

7180853