• DocumentCode
    3460224
  • Title

    Highly sensitive NO2 gas sensor based on zinc oxide/copper oxide hybrid-nanostructures

  • Author

    Fuadi, M.K. ; Yang, Dong ; Park, C. ; Park, Ikmo

  • Author_Institution
    Sch. of Mech., Aerosp., & Syst. Eng., Korea Adv. Inst. of Sci. & Technol. (KAIST), Daejeon, South Korea
  • fYear
    2013
  • fDate
    16-20 June 2013
  • Firstpage
    1641
  • Lastpage
    1644
  • Abstract
    This work explains a facile approach to fabricate hybrid-nanostructure based gas sensor. The prefabricated sensor chip with microheaters was used to grow ZnO/CuO hybrid-nanostructures directly on top of electrodes using hydrothermal reaction at low temperature (<;95 °C). It was found that controlling the precursor concentration and growth time were the keys to minimize the damage on the base structures. As a gas sensor, the fabricated device based on ZnO/CuO hybrid-nanostructures was tested and shown to enhance the response from 2500 to 7100 % as compared to the ZnO nanowire-based device upon the exposure to 20 ppm of NO2 gas at 250 °C.
  • Keywords
    copper compounds; crystal growth from solution; gas sensors; heating; micromechanical devices; nanofabrication; nanosensors; nanostructured materials; nitrogen compounds; zinc compounds; NO2; ZnO-CuO; growth time; highly sensitive gas sensor; hybrid nanostructures; hydrothermal reaction; microheater; precursor concentration; sensor chip; temperature 250 C; Electrodes; Nanowires; Sensitivity; Temperature sensors; Zinc oxide; Hybrid-nanostructures; Joule heating; MEMS; hydrothermal synthesis; metal oxide gas sensor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
  • Conference_Location
    Barcelona
  • Type

    conf

  • DOI
    10.1109/Transducers.2013.6627099
  • Filename
    6627099