Title :
Experiment and Theory for the Thickness Effect of Nano Metal Oxide Gas Sensing Thin Film Dynamic Thickness Effect and Theory of Diffusion Reaction
Author :
Yan, Wang ; Jingjing, Sun ; Jianping, Xing ; Debin, Hong ; Nanwan, Qiu
Author_Institution :
Sch. of Math. & Syst. Sci., Shandong Univ., Jinan
Abstract :
The rule of characteristic time varies with film thickness, gas concentration is given by experiment results. The diffusion reaction model of conductance response for porous gas sensing thin film is proposed; with solution and non-dimensional analyze the reaction diffusion equation, the rule of character time can be yielded. Using the method of combination of theoretical and experimental, the surface adsorption exponent gamma and adsorbing energy Ea are discussed
Keywords :
adsorption; diffusion; gas sensors; nanostructured materials; porous materials; thin films; adsorbing energy; conductance; film thickness; gas sensors; nanometal oxide; porous materials; reaction diffusion equation; surface adsorption; thin film; Electric variables measurement; Equations; Information science; Mathematics; Microelectronics; Physics; Sputtering; Sun; Transistors; Zinc oxide;
Conference_Titel :
Information Acquisition, 2006 IEEE International Conference on
Conference_Location :
Weihai
Print_ISBN :
1-4244-0528-9
Electronic_ISBN :
1-4244-0529-7
DOI :
10.1109/ICIA.2006.305970
