A low-power CMOS integrated sensor for CO2 detection in the percentage range

Author

Humbert, A. ; Tuerlings, B.J. ; Hoofman, R.J.O.M. ; Tan, Zhenyu ; Gravesteijn, D. ; Pertijs, Michiel A. P. ; Bastiaansen, C.W.M. ; Soccol, D.

Author_Institution

NXP Semicond., Leuven, Belgium

fYear

2013

fDate

16-20 June 2013

Firstpage

1649

Lastpage

1652

Abstract

Within the Catrene project “PASTEUR”, a low-cost, low-power capacitive carbon dioxide sensor has been developed for tracking CO₂ concentration in the percentage range. This paper describes this sensor, which operates at room temperature where it exhibits short response times as well as reversible behavior. It can be easily integrated using CMOS compatible processing, and has been combined with a Relative Humidity (RH) sensor, using the same capacitive transduction method, and with a low-power capacitance-to-digital converter, hence enabling correction of cross sensitivity to RH.

Keywords

CMOS integrated circuits; capacitive sensors; carbon compounds; gas sensors; humidity sensors; low-power electronics; CO₂; CO₂ detection; Catrene project PASTEUR; capacitive transduction method; low-power CMOS integrated sensor; low-power capacitance-to-digital converter; low-power capacitive carbon dioxide sensor; percentage range; relative humidity sensor; reversible behavior; short response times; temperature 293 K to 298 K; Atmosphere; Capacitance; Capacitors; Materials; Sensitivity; Sensors; Time factors; CMOS compatible; CO2 sensor; capacitive transducer; low-power sensor; multi-sensor integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627101

Filename

6627101