• DocumentCode
    3460385
  • Title

    Applications Of Chemical-mechanical-polishing Process To Silicon Field Emitter Array

  • Author

    Lee, Jin Ho ; Song, Yoon-Ho ; Kang, Sung Weon ; Yu, Byoung Gon ; Cho, Kyoung Ik ; Lee, Sang Yun ; Yoo, Hyung Joun

  • fYear
    1997
  • fDate
    13-14 Feb 1997
  • Firstpage
    147
  • Lastpage
    148
  • Keywords
    Apertures; Chemical processes; Chemical technology; Dielectric materials; Electrodes; Fabrication; Field emitter arrays; Shape; Silicon; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Information Display, 1997., Proceedings of the Fourth Asian Symposium on
  • Print_ISBN
    962-8273-01-9
  • Type

    conf

  • DOI
    10.1109/ASID.1997.631423
  • Filename
    631423
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3460385