• DocumentCode
    3460577
  • Title

    Novel metal oxide multilayer reflectors for "water-window" wavelengths by atomic layer deposition

  • Author

    Kumagai, Hayato ; Iimura, Y. ; Kobayashi, Kaoru ; Obara, M.

  • Author_Institution
    The Institute of Physical and Chemical Research
  • Volume
    11
  • fYear
    1997
  • fDate
    18-23 May 1997
  • Firstpage
    252
  • Lastpage
    253
  • Keywords
    Atomic layer deposition; Delay effects; Gallium arsenide; Nonhomogeneous media; Optical films; Optical refraction; Optical waveguides; Propagation delay; Substrates; Waveguide lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
  • Conference_Location
    Baltimore, MD, USA
  • Print_ISBN
    0-7803-4125-2
  • Type

    conf

  • DOI
    10.1109/CLEO.1997.603098
  • Filename
    603098
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3460577