DocumentCode :
3460577
Title :
Novel metal oxide multilayer reflectors for "water-window" wavelengths by atomic layer deposition
Author :
Kumagai, Hayato ; Iimura, Y. ; Kobayashi, Kaoru ; Obara, M.
Author_Institution :
The Institute of Physical and Chemical Research
Volume :
11
fYear :
1997
fDate :
18-23 May 1997
Firstpage :
252
Lastpage :
253
Keywords :
Atomic layer deposition; Delay effects; Gallium arsenide; Nonhomogeneous media; Optical films; Optical refraction; Optical waveguides; Propagation delay; Substrates; Waveguide lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-4125-2
Type :
conf
DOI :
10.1109/CLEO.1997.603098
Filename :
603098
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3460577
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