DocumentCode :
3460627
Title :
Dielectric less capacitive MEMS switches
Author :
Blondy, Pierre ; Crunteanu, Aurelian ; Champeaux, Corinne ; Catherinot, Alain ; Tristant, Pascal ; Vendier, Olivier ; Cazaux, J.L. ; Marchand, Laurent
Author_Institution :
IRCOM, Limoges Univ., France
Volume :
2
fYear :
2004
fDate :
6-11 June 2004
Firstpage :
573
Abstract :
This paper presents the fabrication and experimental results on a capacitive switch without dielectric. Using an appropriate design of the switch, acceptable performances have been obtained with Con/Coff ratio around 10. The key advantage of this switch is that dielectric charge trapping related failure modes are eliminated. An example is shown with measured intrinsic loss less than 0.3 dB at 15 GHz and isolation better than 15 dB at the same frequency.
Keywords :
microswitches; microwave switches; reliability; 15 GHz; Con-Coff ratio; dielectric charge trapping related failure modes; dielectric less capacitive MEMS switches; intrinsic loss; isolation; reliability; Contacts; Dielectric devices; Dielectric loss measurement; Electrodes; Fabrication; Microswitches; Radiofrequency microelectromechanical systems; Resists; Switches; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave Symposium Digest, 2004 IEEE MTT-S International
ISSN :
0149-645X
Print_ISBN :
0-7803-8331-1
Type :
conf
DOI :
10.1109/MWSYM.2004.1336046
Filename :
1336046
Link To Document :
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