Title :
Dielectric less capacitive MEMS switches
Author :
Blondy, Pierre ; Crunteanu, Aurelian ; Champeaux, Corinne ; Catherinot, Alain ; Tristant, Pascal ; Vendier, Olivier ; Cazaux, J.L. ; Marchand, Laurent
Author_Institution :
IRCOM, Limoges Univ., France
Abstract :
This paper presents the fabrication and experimental results on a capacitive switch without dielectric. Using an appropriate design of the switch, acceptable performances have been obtained with Con/Coff ratio around 10. The key advantage of this switch is that dielectric charge trapping related failure modes are eliminated. An example is shown with measured intrinsic loss less than 0.3 dB at 15 GHz and isolation better than 15 dB at the same frequency.
Keywords :
microswitches; microwave switches; reliability; 15 GHz; Con-Coff ratio; dielectric charge trapping related failure modes; dielectric less capacitive MEMS switches; intrinsic loss; isolation; reliability; Contacts; Dielectric devices; Dielectric loss measurement; Electrodes; Fabrication; Microswitches; Radiofrequency microelectromechanical systems; Resists; Switches; Voltage;
Conference_Titel :
Microwave Symposium Digest, 2004 IEEE MTT-S International
Print_ISBN :
0-7803-8331-1
DOI :
10.1109/MWSYM.2004.1336046