Title :
Microtribometer based on a rotational grating displacement sensing mechanism
Author :
Hongbin Yu ; Guangya Zhou ; Fook Siong Chau ; Sinha, Sujeet Kumar ; Leong, Jonathan Y.
Author_Institution :
Dept. of Mech. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
A novel microtribometer based on an in-plane rotational grating displacement sensing mechanism is developed, with which the adhesion force and the coefficients of kinetic friction on the sidewall of as-fabricated MEMS device have been successfully measured.
Keywords :
adhesion; diffraction gratings; displacement measurement; friction; micromechanical devices; adhesion force; as-fabricated MEMS device; kinetic friction; microtribometer; rotational grating displacement sensing mechanism; Adhesives; Force; Friction; Gratings; Laser beams; Micromechanical devices; Sensors; MEMS; adhesion; coefficient of friction; grating; microtribometer;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031010
