• DocumentCode
    3460628
  • Title

    Microtribometer based on a rotational grating displacement sensing mechanism

  • Author

    Hongbin Yu ; Guangya Zhou ; Fook Siong Chau ; Sinha, Sujeet Kumar ; Leong, Jonathan Y.

  • Author_Institution
    Dept. of Mech. Eng., Nat. Univ. of Singapore, Singapore, Singapore
  • fYear
    2011
  • fDate
    8-11 Aug. 2011
  • Firstpage
    141
  • Lastpage
    142
  • Abstract
    A novel microtribometer based on an in-plane rotational grating displacement sensing mechanism is developed, with which the adhesion force and the coefficients of kinetic friction on the sidewall of as-fabricated MEMS device have been successfully measured.
  • Keywords
    adhesion; diffraction gratings; displacement measurement; friction; micromechanical devices; adhesion force; as-fabricated MEMS device; kinetic friction; microtribometer; rotational grating displacement sensing mechanism; Adhesives; Force; Friction; Gratings; Laser beams; Micromechanical devices; Sensors; MEMS; adhesion; coefficient of friction; grating; microtribometer;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
  • Conference_Location
    Istanbul
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4577-0334-8
  • Type

    conf

  • DOI
    10.1109/OMEMS.2011.6031010
  • Filename
    6031010
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3460628