Characterization of low-temperature Ultrananocrystalline™ Diamond RF MEMS resonators

Author

Pacheco, Sergio P. ; Zurcher, Peter ; Young, Steven R. ; Weston, Don ; Dauksher, William J. ; Auciello, Orlando ; Carlisle, John A. ; Kane, Neil ; Birrell, James P.

Author_Institution

Technol. Solutions Organ., Freescale Semicond., Inc., Tempe, AZ, USA

Volume

3

fYear

2005

fDate

4-6 Oct. 2005

Abstract

For the first time working MEMS resonators have been produced using low-temperature deposited (550° C) Ultrananocrystalline™ Diamond (UNCD™) films. Using a lumped-element model to fit experimental data, UNCD materials properties such as a Young´s modulus of 710 GPa and an acoustic velocity of 14,243 m/s have been deduced. This is the highest acoustic velocity measured to date for a diamond MEMS structural layer deposited at low temperatures. A 10 MHz resonator shows a DC-tunability of the resonance frequency of 15% between 15 and 25 V and the breakdown voltage behavior shows electrostatic breakdown rather than electro-mechanical pull-down for higher frequency devices. Good resonant frequency reproducibility is observed when cycling the resonators over bias voltages from 15 to 25 V and over RF power levels of -10 to 10 dBm.

Keywords

chemical vapour deposition; cryogenic electronics; diamond; micromechanical resonators; thin films; 10 MHz; 15 to 25 V; RF MEMS resonators; Ultrananocrystalline Diamond films; acoustic velocity; lumped-element model; Acoustic devices; Acoustic measurements; Electrostatic measurements; Material properties; Micromechanical devices; Radiofrequency microelectromechanical systems; Resonance; Resonant frequency; Temperature; Velocity measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2005 European

Print_ISBN

2-9600551-2-8

Type

conf

DOI

10.1109/EUMC.2005.1610241

Filename

1610241