Title :
MEMS spatial light modulator for spectral phase and amplitude modulation
Author :
Dunayevsky, J. ; Marom, Dan M.
Author_Institution :
Appl. Phys. Dept., Hebrew Univ., Jerusalem, Israel
Abstract :
We present a new Micro-Electro-Mechanical-System (MEMS) spatial light modulator (SLM) with micromirrors designed to piston. The unique attribute of this MEMS SLM is that each column is designed modulate amplitude and phase upon reflection based on diffraction principles, and the entire column is activated by two actuators only. This diffractive MEMS modulator is to be used for independently applying amplitude attenuation and phase control along one-dimensional spectrally-resolved frequency components of light.
Keywords :
amplitude modulation; light diffraction; micro-optomechanical devices; micromirrors; optical control; optical design techniques; optical modulation; spatial light modulators; MEMS; amplitude modulation; diffraction principles; microelectromechanical system; optical system design; phase control; piston; spatial light modulator; spectral phase modulation; Micromechanical devices; Micromirrors; Optical interferometry; Optical reflection; Phase modulation; MEMS; Optical Communication; Optical Filter; Opticals Modulator;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031013
