DocumentCode
3460767
Title
A robust, non-resonant piezoelectric micromirror
Author
Bakke, Thor ; Johansen, Inge
Author_Institution
Dept. of Microsyst. & Nanotechnol., SINTEF ICT, Oslo, Norway
fYear
2011
fDate
8-11 Aug. 2011
Firstpage
171
Lastpage
172
Abstract
A highly planar, robust 2D mirror with piezoelectric actuation is presented. The mirror can be operated in a wide frequency range including static deflection. It is ideally suited for target tracking and free-space optical communication.
Keywords
micromirrors; piezoelectric devices; free-space optical communication; highly planar robust 2D mirror; nonresonant piezoelectric micromirror; piezoelectric actuation; static deflection; target tracking; Actuators; Capacitive sensors; Micromirrors; Optical sensors; Robustness; MEMS; PZT; micromirror; mirror; piezoelectric;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location
Istanbul
ISSN
2160-5033
Print_ISBN
978-1-4577-0334-8
Type
conf
DOI
10.1109/OMEMS.2011.6031016
Filename
6031016
Link To Document