Title :
A robust, non-resonant piezoelectric micromirror
Author :
Bakke, Thor ; Johansen, Inge
Author_Institution :
Dept. of Microsyst. & Nanotechnol., SINTEF ICT, Oslo, Norway
Abstract :
A highly planar, robust 2D mirror with piezoelectric actuation is presented. The mirror can be operated in a wide frequency range including static deflection. It is ideally suited for target tracking and free-space optical communication.
Keywords :
micromirrors; piezoelectric devices; free-space optical communication; highly planar robust 2D mirror; nonresonant piezoelectric micromirror; piezoelectric actuation; static deflection; target tracking; Actuators; Capacitive sensors; Micromirrors; Optical sensors; Robustness; MEMS; PZT; micromirror; mirror; piezoelectric;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031016
