DocumentCode
3460806
Title
Simulation-based study of a MEMS Wolter type-I X-ray telescope
Author
Ezoe, Yuichiro ; Ishizu, Kentaro ; Moriyama, Takumi ; Ogawa, Tomomi ; Mitsuishi, Ikuyuki ; Mitsuda, Kazuhisa
Author_Institution
Dept. of Phys., Tokyo Metropolitan Univ., Tokyo, Japan
fYear
2011
fDate
8-11 Aug. 2011
Firstpage
197
Lastpage
198
Abstract
Design and performance estimation of a 4-inch MEMS-based Wolter type-I X-ray telescope using numerical simulations are reported. Optics parameters are optimized to maximize an effective area in consideration of the technical feasibility.
Keywords
LIGA; X-ray optics; astronomical telescopes; micromechanical devices; DRIE; MEMS-based Wolter type-I X-ray telescope; X-ray LIGA; X-ray optics; numerical simulation; optical parameter; space mission; Magnetosphere; Micromechanical devices; Nickel; Optics; Silicon; Telescopes; X-ray imaging; DRIE; Space mission; X-ray LIGA; X-ray optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location
Istanbul
ISSN
2160-5033
Print_ISBN
978-1-4577-0334-8
Type
conf
DOI
10.1109/OMEMS.2011.6031018
Filename
6031018
Link To Document