Title :
Microfabricated spherical pressure sensing particles for pressure and flow mapping
Author :
Yan Xie ; Banerjee, Nabaneeta ; Mastrangelo, Carlos H.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Utah, Salt Lake City, UT, USA
Abstract :
Arrays of hollow, vacuum-sealed microsphere particles were fabricated by deposition of a conformal polymer coating on isotropically-etched micro-molds. When released, the microspheres inflate or deflate under the application of external pressure. The particle deflection characteristics were characterized using optical spectral reflectance and light scattering methods. The observed spectral shift of the particle reflectance was ~200nm/MPa.
Keywords :
flow sensors; light scattering; microfabrication; moulding; pressure sensors; arrays of hollow; conformal polymer coating; flow mapping; isotropically-etched micromolds; light scattering methods; microfabricated spherical pressure sensing particles; optical spectral reflectance; pressure mapping; vacuum-sealed microsphere particles; Atmospheric measurements; Optical device fabrication; Optical reflection; Optical resonators; Particle measurements; Reflectivity; Scattering; Micro-sphere; Optical resonator; Particle Image Manometry; pressure sensors;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627131
