Title :
A new intracranial pressure sensor on polyimide lab-on-a-tube using exchanged polysilicon piezoresistors
Author :
Wu, Z.Z. ; Bhattacharjee, Nandita ; Li, C.Y. ; Hartings, J.A. ; Narayan, R.K. ; Ahn, Chong H.
Author_Institution :
Microsyst. & BioMEMS Lab., Univ. of Cincinnati, Cincinnati, OH, USA
Abstract :
A new intracranial pressure (ICP) sensor on polyimide lab-on-a-tube using exchanged polysilicon piezoresistive film has been designed, fabricated and successfully characterized in this work. Flexible polyimide film (Kapton) was used as the substrate for a lab-on-a-tube type microcatheter. Aluminum induced crystallization (AIC) process with low annealing temperature was utilized for the development of polysilicon film on polyimide substrate as the piezoresistive sensing element for a membrane based pressure sensor. The pressure sensor integrated with polyimide lab-on-a-tube shows a linearity of 0.996 and a sensitivity of 0.17 mV/mmHg in the low pressure range of 0~45 mmHg, which is very suitable for measuring the ICP.
Keywords :
catheters; crystallisation; elemental semiconductors; lab-on-a-chip; membranes; piezoresistive devices; polymer films; pressure sensors; silicon; Kapton; Si; aluminum induced crystallization process; annealing temperature; exchanged polysilicon piezoresistive film; flexible polyimide film; intracranial pressure sensor; lab-on-a-tube type microcatheter; membrane; piezoresistive sensing element; polyimide lab-on-a-tube; Aluminum; Films; Iterative closest point algorithm; Piezoresistive devices; Polyimides; Substrates; Temperature sensors; Aluminum induced crystallization (AIC); Intracranial pressure (ICP); Piezoresistive pressure sensor; Polysilicon; Pressure sensor on polyimide;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627133
