DocumentCode :
3460870
Title :
MEMS Fourier transform IR spectrometer
Author :
Ayerden, N.P. ; Holmstrom, Sture ; Seren, H.R. ; Olcer, S. ; Sharma, Jaibir ; Luettjohann, S. ; Sandner, Thilo ; Urey, Hakan
Author_Institution :
Koc Univ. Istanbul, Istanbul, Turkey
fYear :
2011
fDate :
8-11 Aug. 2011
Firstpage :
11
Lastpage :
12
Abstract :
A comb-actuated MEMS lamellar grating FTIR spectrometer with maximum OPD of 652μm and clear aperture area of 9.6mm2 is developed. Laser and IR interferograms in 2.5-16μm wavelength band are acquired at ambient pressure.
Keywords :
Fourier transform spectrometers; infrared spectrometers; micro-optics; micromechanical devices; MEMS Fourier transform IR spectrometer; OPD; ambient pressure; comb actuated MEMS lamellar grating; wavelength 2.5 mum to 16 mum; Detectors; Fourier transforms; Gratings; Laser beams; Measurement by laser beam; Micromechanical devices; Optical interferometry; Fourier transform spectroscopy; IR; MEMS; lamellar grating;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
ISSN :
2160-5033
Print_ISBN :
978-1-4577-0334-8
Type :
conf
DOI :
10.1109/OMEMS.2011.6031021
Filename :
6031021
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3460870
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