• DocumentCode
    3460870
  • Title

    MEMS Fourier transform IR spectrometer

  • Author

    Ayerden, N.P. ; Holmstrom, Sture ; Seren, H.R. ; Olcer, S. ; Sharma, Jaibir ; Luettjohann, S. ; Sandner, Thilo ; Urey, Hakan

  • Author_Institution
    Koc Univ. Istanbul, Istanbul, Turkey
  • fYear
    2011
  • fDate
    8-11 Aug. 2011
  • Firstpage
    11
  • Lastpage
    12
  • Abstract
    A comb-actuated MEMS lamellar grating FTIR spectrometer with maximum OPD of 652μm and clear aperture area of 9.6mm2 is developed. Laser and IR interferograms in 2.5-16μm wavelength band are acquired at ambient pressure.
  • Keywords
    Fourier transform spectrometers; infrared spectrometers; micro-optics; micromechanical devices; MEMS Fourier transform IR spectrometer; OPD; ambient pressure; comb actuated MEMS lamellar grating; wavelength 2.5 mum to 16 mum; Detectors; Fourier transforms; Gratings; Laser beams; Measurement by laser beam; Micromechanical devices; Optical interferometry; Fourier transform spectroscopy; IR; MEMS; lamellar grating;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
  • Conference_Location
    Istanbul
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4577-0334-8
  • Type

    conf

  • DOI
    10.1109/OMEMS.2011.6031021
  • Filename
    6031021
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3460870