Title :
Fabrication and evaluation of polymer MEMS mirror based on the mechanical characteristic of polymer containing magnetic particles
Author :
Miura, Tsuyoshi ; Suzuki, Takumi ; Terao, Kyohei ; Takao, Hidekuni ; Oohira, Fumikazu ; Kaibara, Y. ; Namazu, T.
Author_Institution :
Dept. of Intell. Mech. Syst. Eng., Kagawa Univ., Takamatsu, Japan
Abstract :
In this study, we have evaluated the mechanical characteristic and the attractive force of the SU-8 containing magnetic particles. Then, we have fabricated the mirror device based on the mechanical characteristic of the polymer and evaluated the deflection characteristic. Two kinds of the mirror devices composed of SU-8 containing Fe2O3 (particle size: p.s.5μm) and Fe3O4 (p.s.5μm) particles are fabricated and evaluated. The optical deflection angles of both devices are ±20° in a small current. Then, we confirmed the possibility to realize the low cost and large deflection angle polymer MEMS mirror using SU-8 containing magnetic particles.
Keywords :
iron compounds; magnetic particles; micro-optomechanical devices; microfabrication; micromirrors; optical fabrication; optical polymers; particle size; Fe2O3; Fe3O4; SU-8 polymer; deflection properties; magnetic particles; mechanical properties; optical deflection angles; optical fabrication; particle size; polymer MEMS mirror; size 5 mum; Force; Glass; Magnetic particles; Micromechanical devices; Mirrors; Polymers; Stress; MEMS; Magnetic Particles; Mirror; Polymer; SU-8;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031025
