Fabrication of polydimethylsiloxane microlens arrays on curved surfaces

Author

Aldalali, B. ; Difeng Zhu ; Hongrui Jiang

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Wisconsin-Madison, Madison, WI, USA

fYear

2011

fDate

8-11 Aug. 2011

Firstpage

239

Lastpage

240

Abstract

We report on polydimethlysiloxane (PDMS) microlens arrays on curved surfaces. The mold of the microlens arrays was formed using the photoresist reflow method on top of SU-8 islands connected to each other by a thin layer of SU-8. The mold was transferred to PDMS using a double transfer method. Stress simulation determined that when placed on a curved surface the flexible polymer connecting the microlens arrays endured the most stress minimizing the optical deformation of the microlens arrays. Focal point results demonstrate uniformity of the microlenses within an array with an estimated focal length of 330 μm.

Keywords

deformation; microlenses; optical arrays; optical fabrication; optical polymers; photoresists; SU-8 islands; curved surfaces; double transfer method; flexible polymer; focal point; optical deformation; photoresist reflow method; polydimethylsiloxane microlens arrays; stress simulation; Bridges; Fabrication; Lenses; Microoptics; Optical arrays; Stress; Surface treatment; curved surfaces; microlens array; photoresist reflow;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2011 International Conference on

Conference_Location

Istanbul

ISSN

2160-5033

Print_ISBN

978-1-4577-0334-8

Type

conf

DOI

10.1109/OMEMS.2011.6031029

Filename

6031029