Title :
Static and dynamic characterization of poly-SiGe grating light valves
Author :
Rudra, S. ; Van Thourhout, Dries ; Witvrouw, A. ; De Coster, J. ; Van Hoof, R.
Author_Institution :
Photonics Res. Group, Ghent Univ. - IMEC, Ghent, Belgium
Abstract :
We present the fabrication and the characterization results of poly-SiGe grating light valves showing excellent contrast. We also discuss the different dimensional parameters that affect the switching time of the device through squeeze film damping.
Keywords :
Ge-Si alloys; damping; diffraction gratings; light valves; optical fabrication; optical films; optical squeezing; optical switches; semiconductor materials; SiGe; dimensional parameters; dynamic properties; grating light valves; squeeze film damping; static properties; switching time; Damping; Diffraction gratings; Gratings; Micromechanical devices; Optical films; Valves; Poly-SiGe; grating light valve; squeeze film damping;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031031
