Title :
Vertical flaps of arbitrary shape for reflective MEMS displays and optical modulators
Author :
Jutzi, F. ; Noell, Wilfried ; de Rooij, Nico F.
Author_Institution :
Sensors, Actuators & Microsyst. Lab. (SAMLAB), Ecole Polytech. Fed. de Lausanne (EPFL), Neuchatel, Switzerland
Abstract :
A novel technological platform is presented for the fabrication of vertical flaps and gratings of arbitrary shape. The flaps are suspended by torsion beams and actuated electrostatically at voltages as low as 10V. The main application is a high contrast reflective display.
Keywords :
diffraction gratings; display devices; electrostatic actuators; micro-optomechanical devices; optical modulation; arbitrary shape; electrostatic actuator; gratings; high contrast reflective display; optical modulators; reflective MEMS displays; torsion beams; vertical flaps; Electrodes; Fabrication; Geometry; Gratings; Micromechanical devices; Optical sensors; Shape; electrostatic micromirrror; gratings; reflective display; shutter array; trench refilling; vertical flaps;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031032
