Title :
Electrostatically addressable visored shutter array by electroplating for astronomical spectrography
Author :
Takahashi, Tatsuro ; Mita, M. ; Motohara, K. ; Kobayashi, Nao ; Fujita, Hideaki ; Toshiyoshi, Hiroshi ; Kashikawa, N.
Author_Institution :
IIS, Univ. of Tokyo, Tokyo, Japan
Abstract :
We report a new structure of electrostatically addressable and latchable multi-slit shutter array for the astronomical spectrograph with an improved optical and electromechanical performance using the electroplated visors.
Keywords :
astronomical instruments; astronomical spectra; electroplating; electrostatic devices; micro-optomechanical devices; optical arrays; optical elements; optical fabrication; spectroscopy; astronomical spectrography; electromechanical performance; electroplated visor; electroplating; electrostatically addressable shutter array; electrostatically addressable visored shutter array; latchable multislit shutter array; optical performance; Arrays; Electrostatics; Latches; Metals; Micromechanical devices; Mirrors; Substrates; Electroplating; Shutter Array; Spectrography;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031033
