Title :
MEMS endomicroscope for simultaneous bright-field microscopy and optical coherence tomography
Author :
Blattmann, M. ; Kretschmer, S. ; Thiele, S. ; Zappe, H. ; Herkommer, A. ; Seifert, A.
Author_Institution :
Dept. of Microsyst. Eng.-IMTEK, Univ. of Freiburg, Freiburg, Germany
Abstract :
We present the first silicon-based endomicroscope that combines wide field and confocal imaging modalities in a single device, whose functionality includes simultaneous operation of bright-field microscopy and optical coherence tomography (OCT). This highly-compact multi-modal probe is based on silicon bulk micromachining and has cross-sectional dimensions of 2×2.76mm2. The achieved lateral resolutions are 6.2 μm and 17.8 μm for bright-field microscopy and OCT, respectively.
Keywords :
bioMEMS; biomedical optical imaging; elemental semiconductors; endoscopes; micromachining; optical microscopy; optical tomography; silicon; MEMS endomicroscope; OCT; Si; confocal imaging modalities; cross-sectional dimensions; highly-compact multimodal probe; lateral resolutions; optical coherence tomography; silicon bulk micromachining; silicon-based endomicroscope; simultaneous bright-field microscopy; Image resolution; Lithography; Micromechanical devices; Optical device fabrication; Optical imaging; Silicon compounds; Multi-modal imaging; bright-field microscopy; optical coherence tomography; silicon optical bench;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7180900
