• DocumentCode
    3461082
  • Title

    2-axis MEMS scanner for a laser range finder

  • Author

    Aoyagi, I. ; Shimaoka, Kazuhiro ; Kato, Shigeo ; Makishi, W. ; Kawai, Yusuke ; Tanaka, Shoji ; Ono, Takahito ; Esashi, Masayoshi ; Hane, Kazuhiro

  • Author_Institution
    MEMS Device Lab., TOYOTA Central R&D Labs., Inc., Nagakute, Japan
  • fYear
    2011
  • fDate
    8-11 Aug. 2011
  • Firstpage
    39
  • Lastpage
    40
  • Abstract
    A moving-magnet-type 2-axis MEMS scanner with a rotation angle detector has been developed. The fabricated MEMS scanner demonstrated a raster scan and 2-axis rotation angles detection with one Hall sensor.
  • Keywords
    laser ranging; microsensors; Hall sensor; laser range finder; moving-magnet-type 2-axis MEMS scanner; raster scan; rotation angle detector; Laser beams; Magnetic fields; Measurement by laser beam; Micromechanical devices; Mirrors; Permanent magnets; Rotation measurement; Laser range finder; MEMS; scanner;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
  • Conference_Location
    Istanbul
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4577-0334-8
  • Type

    conf

  • DOI
    10.1109/OMEMS.2011.6031035
  • Filename
    6031035
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3461082