Title :
2-axis MEMS scanner for a laser range finder
Author :
Aoyagi, I. ; Shimaoka, Kazuhiro ; Kato, Shigeo ; Makishi, W. ; Kawai, Yusuke ; Tanaka, Shoji ; Ono, Takahito ; Esashi, Masayoshi ; Hane, Kazuhiro
Author_Institution :
MEMS Device Lab., TOYOTA Central R&D Labs., Inc., Nagakute, Japan
Abstract :
A moving-magnet-type 2-axis MEMS scanner with a rotation angle detector has been developed. The fabricated MEMS scanner demonstrated a raster scan and 2-axis rotation angles detection with one Hall sensor.
Keywords :
laser ranging; microsensors; Hall sensor; laser range finder; moving-magnet-type 2-axis MEMS scanner; raster scan; rotation angle detector; Laser beams; Magnetic fields; Measurement by laser beam; Micromechanical devices; Mirrors; Permanent magnets; Rotation measurement; Laser range finder; MEMS; scanner;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031035
