Improved MEMS-in-TEM setup for high sensitivity thermal characterization of nanowire using a new TEM cryo-holder

Author

Jalabert, Laurent ; Valet, G. ; Chorosz, A. ; Guo, Di ; Kometani, R. ; Guillou, Herve ; Sato, Takao ; Volz, Sebastian ; Fujita, Hideaki

Author_Institution

LIMMS, Univ. of Tokyo, Tokyo, Japan

fYear

2013

fDate

16-20 June 2013

Firstpage

1839

Lastpage

1842

Abstract

Thermal conductivity of diamond-like-carbon nanowire is investigated by combining MEMS in TEM (transmission electron microscope) with a new cryogenic TEM holder allowing in-situ electrical measurements from 90K to 380K. A suspended DLC nanowire of 80nm in diameter and 10mic in length was locally grown by FIB-CVD in between an integrated micro-heater and a temperature sensor. Combined with a special Wheastone bridge configuration, we show drastic improvement of temperature detection on the sensor and estimate the thermal conductance of the DLC nanowire at low temperature in-situ in TEM.

Keywords

chemical vapour deposition; diamond-like carbon; focused ion beam technology; microsensors; nanowires; sample holders; temperature sensors; thermal conductivity; transmission electron microscopy; C; FIB-CVD; MEMS-in-TEM setup; TEM cryo-holder; Wheastone bridge configuration; diamond-like-carbon nanowire; high sensitivity thermal characterization; in-situ electrical measurements; integrated microheater; size 80 nm; suspended DLC nanowire; temperature 90 K to 380 K; temperature detection; temperature sensor; thermal conductivity; transmission electron microscope; Bridge circuits; Heating; Micromechanical devices; Standards; Temperature measurement; Temperature sensors; Thermal conductivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627148

Filename

6627148