Title :
Closed-loop pressure control of an adaptive single chamber membrane lens with integrated actuation
Author :
Draheim, J. ; Burger, Thomas ; Kamberger, R. ; Wallrabe, U.
Author_Institution :
Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
Abstract :
We introduce a closed-loop pressure control of a single chamber adaptive fluidic membrane lens with an integrated piezoelectric bending actuator. For this purpose a pressure sensor is integrated into the lens and allows for a measurement of the chamber pressure as a function of the refractive power. The linear relation between pressure and refractive power allows to eliminate the typical hysteresis effects of piezo actuators.
Keywords :
adaptive optics; closed loop systems; integrated optics; lenses; optical control; piezoelectric actuators; pressure control; pressure measurement; pressure sensors; chamber pressure measurement; closed-loop pressure control; hysteresis effects; integrated actuation; integrated piezoelectric bending actuator; pressure sensor; refractive power; single chamber adaptive fluidic membrane lens; Actuators; Fabrication; Glass; Lenses; Optical sensors; Pressure measurement; Substrates; adaptive lens; control; pressure sensor;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031036
