Self powered inertia sensor based on vibration energy harvester using electret and ferroelectric plate

This paper reports a self-powered inertia sensor based on a vibration energy harvester using electret and ferroelectric plate, which we previously developed. We noticed that the generated electrical power has relation to the inertia force input to the proof mass. We characterized the performance of energy harvester device as an inertia sensor. It was proven that output voltage V_out is proportional to input velocity when ω≫ω_n, so does it to input jerk when ω≪ω_n, where ω is angular frequency, and ω_n is resonant one of mechanical vibration system of sensor. The proposed sensor has merit of self-powered, since output voltage of energy harvester itself is utilized as output signal of sensor.