• DocumentCode
    3461138
  • Title

    A symmetric hybrid MEMS scanner with electrothermal and electrostatic actuators

  • Author

    Li Li ; Bauer, Ralf ; Brown, G. ; Uttamchandani, Deepak

  • Author_Institution
    Dept. of Electron. & Electr. Eng., Univ. of Strathclyde, Glasgow, UK
  • fYear
    2011
  • fDate
    8-11 Aug. 2011
  • Firstpage
    163
  • Lastpage
    164
  • Abstract
    A hybrid two-axis scanner combining both electrostatic and electrothermal actuators was fabricated using the SOIMUMPs. Experimental evaluation shows the device is capable of three degree-of-freedom movement, and can be programmed to generate two-axis scan patterns.
  • Keywords
    electrostatic actuators; optical scanners; silicon-on-insulator; SOIMUMP; electrostatic actuators; electrothermal actuators; hybrid two-axis; symmetric hybrid MEMS scanner; two-axis scan patterns; MEMS; SOIMUMPs; microactuators; optical hybrid scanner;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
  • Conference_Location
    Istanbul
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4577-0334-8
  • Type

    conf

  • DOI
    10.1109/OMEMS.2011.6031038
  • Filename
    6031038
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3461138