Title :
A symmetric hybrid MEMS scanner with electrothermal and electrostatic actuators
Author :
Li Li ; Bauer, Ralf ; Brown, G. ; Uttamchandani, Deepak
Author_Institution :
Dept. of Electron. & Electr. Eng., Univ. of Strathclyde, Glasgow, UK
Abstract :
A hybrid two-axis scanner combining both electrostatic and electrothermal actuators was fabricated using the SOIMUMPs. Experimental evaluation shows the device is capable of three degree-of-freedom movement, and can be programmed to generate two-axis scan patterns.
Keywords :
electrostatic actuators; optical scanners; silicon-on-insulator; SOIMUMP; electrostatic actuators; electrothermal actuators; hybrid two-axis; symmetric hybrid MEMS scanner; two-axis scan patterns; MEMS; SOIMUMPs; microactuators; optical hybrid scanner;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031038
