DocumentCode :
3461175
Title :
A 2-D raster scanning mirror driven by piezoelectric cantilever actuator array in combinational mode — Bending and torsional
Author :
Kah How Koh ; Kobayashi, Takehiko ; Chengkuo Lee
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
fYear :
2011
fDate :
8-11 Aug. 2011
Firstpage :
41
Lastpage :
42
Abstract :
A novel actuation mechanism for a gold-coated MEMS mirror driven by 1×10 piezoelectric Pb(Zr, Ti)O3 actuators integrated with silicon cantilever beam has been developed and demonstrated for 2-D raster scanning applications.
Keywords :
cantilevers; gold; lead compounds; micro-optomechanical devices; mirrors; piezoelectric actuators; silicon; 2D raster scanning mirror; PbTiO3; PbZrO3; bending mode; combinational mode; gold-coated MEMS mirror; piezoelectric cantilever actuator array; silicon cantilever beam; torsional mode; Actuators; Arrays; Electrodes; Mirrors; Resonant frequency; Structural beams; Voltage measurement; Mirror; Optical Microelectromechanical Systems; Piezoelectric Actuator;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
ISSN :
2160-5033
Print_ISBN :
978-1-4577-0334-8
Type :
conf
DOI :
10.1109/OMEMS.2011.6031040
Filename :
6031040
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3461175
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