Title :
MEMS gyroscope bias drift cancellation using continuous-time mode reversal
Author :
Kline, Mitchell H. ; Yeh, Y.-C. ; Eminoglu, Burak ; Izyumin, I.I. ; Daneman, M. ; Horsley, David A. ; Boser, Bernhard E.
Author_Institution :
Univ. of California, Berkeley, Berkeley, CA, USA
Abstract :
A continuous-time mode-reversal technique demonstrates reduction of bias drift of a MEMS pendular gyroscope. The technique relies on continuous excitation of two axes of the gyroscope. Forces required to maintain a particular proof-mass trajectory indicate the angular rate. The individual forcers also contain correlated error terms which can be cancelled with an appropriate linear combination. This technique demonstrates an Allan-deviation improvement from 9 deg/hr to 2 deg/hr on a 3.3kHz MEMS vibratory gyroscope.
Keywords :
error analysis; gyroscopes; microsensors; statistical analysis; Allan deviation improvement; MEMS pendular gyroscope; bias drift cancellation; continuous time mode reversal technique; correlated error cancellation; frequency 3.3 kHz; proof mass trajectory; Gyroscopes; Micromechanical devices; Noise; Oscillators; Resonant frequency; Trajectory; Vectors; MEMS gyroscopes; bias drift cancellation; mode reversal;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627152
