Surface profiling and characterization of microlenses utilizing a Shack-Hartmann wavefront sensor

Author

Chenhui Li ; Hall, G. ; Aldalali, B. ; Difeng Zhu ; Eliceiri, K. ; Hongrui Jiang

Author_Institution

Univ. of Wisconsin-Madison, Madison, WI, USA

fYear

2011

fDate

8-11 Aug. 2011

Firstpage

185

Lastpage

186

Abstract

We report on the characterization of microlenses utilizing the three-dimensional (3D) surface profile obtained from a Shack-Hartmann wavefront sensor. This method can be applied to most types of microlenses, especially liquid ones. Both a solid and a liquid microlens were characterized. The surface data was analyzed and then exported into Zemax to compute their optical properties. The wavefront error of the liquid lens tested increased from 0.44 to 2.41 waves as its focal length was tuned from 10.1 to 4.3 mm. The surface profiles can also be used to study the effect of gravity on microlenses and surface wetting for optimizing the lens fabrication procedure.

Keywords

microlenses; optical fabrication; optical focusing; wavefront sensors; wetting; 3D surface profiling; Shack-Hartmann wavefront sensor; Zemax; focal length; lens fabrication; liquid microlenses; surface data; surface wetting; wavefront error; Adaptive optics; Lenses; Microoptics; Optical device fabrication; Optical sensors; Optical surface waves; Surface waves; Shack-Hartmann wavefront sensor; liquid microlens; surface profile; three-dimensional;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2011 International Conference on

Conference_Location

Istanbul

ISSN

2160-5033

Print_ISBN

978-1-4577-0334-8

Type

conf

DOI

10.1109/OMEMS.2011.6031041

Filename

6031041