Title :
Surface profiling and characterization of microlenses utilizing a Shack-Hartmann wavefront sensor
Author :
Chenhui Li ; Hall, G. ; Aldalali, B. ; Difeng Zhu ; Eliceiri, K. ; Hongrui Jiang
Author_Institution :
Univ. of Wisconsin-Madison, Madison, WI, USA
Abstract :
We report on the characterization of microlenses utilizing the three-dimensional (3D) surface profile obtained from a Shack-Hartmann wavefront sensor. This method can be applied to most types of microlenses, especially liquid ones. Both a solid and a liquid microlens were characterized. The surface data was analyzed and then exported into Zemax to compute their optical properties. The wavefront error of the liquid lens tested increased from 0.44 to 2.41 waves as its focal length was tuned from 10.1 to 4.3 mm. The surface profiles can also be used to study the effect of gravity on microlenses and surface wetting for optimizing the lens fabrication procedure.
Keywords :
microlenses; optical fabrication; optical focusing; wavefront sensors; wetting; 3D surface profiling; Shack-Hartmann wavefront sensor; Zemax; focal length; lens fabrication; liquid microlenses; surface data; surface wetting; wavefront error; Adaptive optics; Lenses; Microoptics; Optical device fabrication; Optical sensors; Optical surface waves; Surface waves; Shack-Hartmann wavefront sensor; liquid microlens; surface profile; three-dimensional;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031041
