Title :
Monolithic polymer microlens arrays with anti-reflective structures using a metal annealed mask
Author :
Hyukjin Jung ; Cheol Song ; Ki-Hun Jeong
Author_Institution :
Dept. of Bio & Brain Eng., Korea Adv. Inst. of Sci. & Technol. (KAIST), Daejeon, South Korea
Abstract :
This work presents a simple method for a nanofabrication of antireflective structures (AR) over the surface of polymer microlens arrays by incorporating a metal annealed mask and isotropic etching. The reflection of AR microlens is 83% lower than that of conventional microlens.
Keywords :
annealing; antireflection coatings; integrated optics; masks; microfabrication; microlenses; nanofabrication; nanophotonics; optical arrays; optical polymers; antireflective structures; isotropic etching; metal annealed mask; monolithic polymer microlens arrays; nanofabrication; Annealing; Lenses; Microoptics; Optical imaging; Optical reflection; Polymers; Silver; antireflective structure; imaging; metal annealing; microlens arrays; resist melting (reflow);
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031042
