DocumentCode
3461236
Title
Novel concept and technology for a self resonant magnetic field sensor
Author
Simon, P. ; Paul, O.
Author_Institution
Microsyst. Mater. Lab., Univ. of Freiburg, Freiburg, Germany
fYear
2013
fDate
16-20 June 2013
Firstpage
1863
Lastpage
1866
Abstract
This paper reports significant improvements on our previous resonant magnetic field sensor [1]. With a new design implementing three magnetically coupled resonators and a novel fabrication process building on a glass/silicon stack, we reduce the previously dominant parasitic feedthrough capacitance between driving and sensing ports by a factor of 6. This simplifies the measurement circuit and enables new modes of operation in self-resonance.
Keywords
elemental semiconductors; glass; magnetic field measurement; magnetic sensors; resonators; silicon; Si; dominant parasitic feedthrough capacitance; fabrication process; glass-silicon stack; magnetically coupled resonator; measurement circuit; self resonant magnetic field sensor; Capacitance; Glass; Magnetic fields; Oscillators; Resonant frequency; Sensors; Silicon; Magnetic field sensor; field concentrator; magnetic coupling; parasitic coupling; silicon on glass;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location
Barcelona
Type
conf
DOI
10.1109/Transducers.2013.6627154
Filename
6627154
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