Fabrication of a quasistatic-resonant microscanner by implementing a vertical combdrive through wafer assembly actuation

This paper reports on the fabrication and first results on the operation performance of a new developed quasistatic-resonant micromirror capable of performing very fast resonant sinusoidal as well as slow linear and even static scanning. To assure maximum quality and reliability the fabrication process is built upon the well established base technology for resonant micromirrors at IPMS, expanding it with the option of linear and static actuation. The in-plane fabricated combdrive actuators undergo a vertical out-of-plane deflection when being combined with an applicable top wafer. During the wafer assembly the down pressing stamps of the top wafer displace some platforms, which are connected via coupled hinges with one part of the opposing actuation electrodes and make them move out of plane in well defined manner. This initial comb drive deflection is permanent.